The MKS Type 246 246C Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 246 246C is a single channel single readout unit. Compatible with mass flow controllers and mass flow readouts 179, 180, 579, 1179, 1479, 1480, 1559, 1579, 2179, M10M, M100. Signal cables for the MKS 246 246C are available on this website. For Specifications on this MKS 246 246C See AVAILABLE DOWNLOADS Below.

The MKS Vacuum Sensor Card supports dual pirani convection sensors and is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS Vacuum Sensor Card Cold Cathode is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The 937B controller is designed for versatility, reliability and economy. The large, easy to read, liquid crystal display provides readout for up to six sensors simultaneously. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. This controller enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This is a raw unit without cards. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables and optional cards for the MKS 946 are available on this website.

The MKS Control Card Mass Flow Controller is compatible with the 946 and dual Mass Flow controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS Vacuum Sensor Card supports capacitance manometers and Piezo sensors with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

The MKS Type 247 Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 247 is a four channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts 179, 180, 579, 1179, 1479, 1480, 1559, 1579, 2179, M10M, M100. Signal cables for the MKS 247 are available on this website. For Specifications on this MKS 247 See DOWNLOADS.

The MKS Vacuum Sensor Card Cold Cathode is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-02000SV valve features a 2000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is Swagelok-TM Swagelok Company

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-10000SV valve features a 10000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is scc/sec He. Swagelok-TM Swagelok Company

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-02000SV valve features a 2000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is scc/sec He. Swagelok-TM Swagelok Company

When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-05000RV valve features a 5,000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is scc/sec He. Swagelok-TM Swagelok Company

The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are 1/4" Swagelok® with Viton® O-Ring. The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.

The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are Swagelok® 4 VCR® The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.

The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are 1/4" Swagelok® with Viton® O-Ring. The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.

The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are 1/4" Swagelok® with Viton® O-Ring. The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.

The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are 1/4" Swagelok® with Viton® O-Ring. The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.

The MKS 1179C is an all-metal mass flow controller designed to measure the flow of gases in a wide variety of applications. Input and output connections are 1/4" Swagelok® with Viton® O-Ring. The MKS 1179C mass flow controllers are available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm.The 1179C is a direct form-fit-function replacement for the most common mass flow meters on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 1179C is compatible with mass flow controller power supply and display electronics from MKS or other manufacturers.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 200 sccm and a control range of 4 to 200 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 50 sccm and a control range of 1 to 50 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR®. It has a Full Scale Flow Range of 500 sccm and a control range of 10 to 500 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Digital calibration yields 1% of set point accuracy on the calibration gas. Typical response times are on the order of 500 milliseconds. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 100 sccm and a control range of 2 to 100 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.

The MKS GM50A Mass Flow Controller is capable of being configured to control N2 or equivalent, having a Full-Scale Flow Range of 20 sccm and a control range of 0.4 to 20 sccm. It has a 15-pin D-subminiature analog connector with tied grounds, a 0-5 VDC flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables.