MKS 431 Cold Cathode Vacuum Sensor, 1x10-11 to 1x10-2 Torr, CF-2.75 in. Flange Fitting.
MKS Part Number: 104310002.
The MKS 431 Cold Cathode Vacuum Sensor features a 1x10-11 to 1x10-2 Torr vacuum measurement range, high operating temperature and a 2.75 inch size CF flange fitting. It is based on the ionization probability of the gas, with the ionization as a result of a high voltage discharge of electrons. These cold cathode pressure vacuum sensors are based on an inverted magnetron design, for an increased measurement range. The dual feedthrough for ion collection is a unique feature, making the pressure reading more accurate than other cold cathode vacuum and pressure sensors. Signal cables for this cold cathode vacuum sensor are available on this website.
