MKS GM50A Mass Flow Controller (MFC) Analog-Controlled, Ranged of 1 to 50 sccm, 15-pin D-subminiature Connector, 4 VCR® Male. PN: GM50A013501RMM020

This MKS GM50A Mass Flow Controller is calibrated for N₂ or equivalent, with a control range of 1 to 50 sccm. It has a 15-pin D-subminiature analog connector with tied grounds and 0-5 VDC flow input and output signals. The gas inlet and outlet fittings are Swagelok® 4 VCR® male. The valve seal is normally closed and made of Teflon™. Typical response times are on the order of 500 milliseconds.