Inficon PEG050 Penning Gauge KF40, 10-9 Torr, PN 399-511.
The INFICON Penning Gauge PEG050 provides reliable high vacuum measurements.The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition,the gauge can be operated also in sputtering applications. For complete use and specifications see .pdf's to the left at Downloads.
Key Features:
• Rugged.
• Insensitive to air inrushes and vibrations.
• Easy disassembly and cleaning of the measurement system.
• Exchangeable cathode plate.
• Improved ignition characteristics through patented anode design.
• Titan cathodes plates grant longer lifetime.
• Vacuum Range: 0.75 X 10-2 to 10-9 Torr.
• Use Vacuum Gauge Controller VGC023.
