Agilent Varian TwisTorr 84-FS Turbomolecular Vacuum Pump With ISO 63 Inlet, 67 L/S Pumping Speed, For UHV Applications. PN: X3502-64000
Agilent Varian TwisTorr 84-FS Turbo Vacuum Pump With ISO 63 Inlet, 67 L/S Pumping Speed, For UHV Applications.
Cooling Kit Required, Agilent Varian Part No. X3502-64000.


These Agilent Varian TwisTorr 84 FS turbomolecular vacuum pumps have an ISO 63 inlet flange, with 67 L/S pumping speed. The 84 FS turbo pumps are a supercharged version of the 74 FS, its 1350 Hz overclocked drive frequency allows for a 10% boost in pumping speed, making it a specialized pump for the ultra-high vacuum (UHV). For most general high vacuum (HV) applications, Ideal Vacuum recommends the more economic-dependable 74 FS turbo pump models. These amped-up Agilent 84 FS turbo pumps create a higher compression ratio for light gases, such as Hydrogen and Helium, to deliver an elevated throughput and reach the lowest ultimate pressure. These Agilent Varian 84 FS turbomolecular high-vacuum pumps have an ISO-63K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3502-64000. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 3.75x10-10 Torr when used correctly. These TwisTorr 84-FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.

These Agilent Varian TwistTorr 84 FS turbo pumps have an ISO-63 inlet flange, has a pumping speed of 67 l/s of nitrogen, a KF-16 foreline flange, and ambient operating temperature from 5 °C to +35 °C. These 84 FS turbo pumps have a start up time of less than 2 minutes, rotational speed of 81,000 rpm, and recommended foreline roughing pumps of either dry scroll (IDP-3 or IDP7) or oil-sealed rotary vane (DS-40M or DS-102). The cooling requirements for forced-air cooling are ambient air temperature of 5 to 35 °C or with water cooling are a minimum flow of 0.30 gpm, between 15 to 25 °C at 45 to 75 psi.

The new Agilent Twistorr 84 FS offers a blend of performance and features that is suited for a wide range of UHV applications. It can be used in a variety of fields:

Typical Turbo Pump Applications Include:
  • Mass Spectrometry
  • Gas Chromatography Mass Spectrometry (GC/MS)
  • Liquid Chromatography Mass Spectrometry (LC/MS)
  • Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
  • Time-of-Flight Mass Spectrometry (TOF)

Vacuum in Research and Development:
  • High Energy Physics
  • Fusion Technology
  • General UHV Research
  • Synchrotron Light Sources Particle Accelerators

Nanotechnology Instruments:
  • Electron Microscopy
  • Scanning Electron Microscopy (SEM)
  • Transmission Electron Microscopy (TEM)
  • Focused Ion-beam Systems (FIB)
  • Surface Analysis
  • Semiconductor Manufacturing

Industrial Vacuum Processing:
Thin Film Deposition:
  • Glass coating equipment (architectural and automotive glass, flat panel displays)
  • Thin film solar cells production (photo-voltaic)
  • Optical data media (CD, DVD, Magneto Optical Discs)
  • Magnetic storage media
  • Surface treatments
  • Optical coating (ophthalmic, precision opto-electronics)
  • Roll/Web coating on films or foils

Device Processing:
  • TV & Monitor picture tube manufacture
  • Evacuation of lamps (motorway lighting, beamers)
  • X-Ray tubes & electron devices

General Processes:
  • Vacuum Furnaces
  • Metallurgy
Product: Agilent Varian TwisTorr 84-FS Turbomolecular Vacuum Pump With ISO 63 Inlet, 67 L/S Pumping Speed, For UHV Applications. PN: X3502-64000
Condition:      New
Warranty:     Agilent Warranty
Part Number: P106197
Price: $4,376.40
Sale Price: $4,376.40       Regular Price: $6,252.00