销售： NT$22,174.18
| Specifications | |||
|---|---|---|---|
| Specification | Units | AX-65 with cold cap | AX-65 with baffle |
| Operating Range |
Torr mbar |
3x10⁻³ to < 5x10⁻⁸3.9x10⁻³ to < 6.5x10⁻⁸ | 8.0x10⁻³ to < 5x10⁻⁸10.4x10⁻³ to < 6.5x10⁻³ |
| Pumping Speed, Maximum |
l/s, Airl/s, Helium | 6590 | 3065 |
| Throughput (Air), Max. Optimum Range Overload Range (@ 1x10⁻² Torr) |
Torr-l/s mbar-l/s Torr-l/s mbar-l/s |
0.19 0.25 0.30 0.40 |
|
| Forepressure, Max.No Load Full Load |
Torr mbar Torr mbar |
0.751.000.600.78 | |
| Compression Ratio | Air He |
4x10⁻⁷ 4x10⁻⁶ |
|
| Backstreaming Rate at Pump Inlet |
mg/cm² | < 2x10⁻⁴ | < 2x10⁻⁵ |
| Electrical Power VAC, 50/60 Hz 1 Phase |
Watts | 200/250 | |
| Warmup Time | minutes | 7 | |
| Cooldown Time | minutes | 10 | |
| Fluid Charge | cc | 30 | |
| Recommended backing pump capacity |
cfm (m³/hr) | ≥ 1.5 (2.5) | |
| Cooling Fan | cfm | 30 | |
| Inlet Flange | N/A | NW50 or ISO-63-K | |
| Body | N/A | Stainless steel | |
| Jet Assembly | N/A | Three-stage, self-aligning, aluminum, w/ aluminum cold cap | |
| Net Weight | lbs (kg) | 8 (3.63) | |
| Description | Part No. | Item |
|---|---|---|
| Jet Assembly | L9674301 | 1 |
| Cold Cap | L9675301 | 2 |
| Inlet Baffle | L9706001 | 3 |
| Inlet Baffle Retrofit Kit | R1160065 | 3 |
| Jet Alignment Kit | L9995301 | 4 |
| Heaters (one heater required per pump) | 5 | |
| 90 V / 250 watt Heater Harness | L9994301 | 5.1 |
| 115 V / 250 watt Heater Harness | L9994303 | 5.2 |
| 165 V / 250 watt Heater Harness | L9994302 | 5.3 |
| 220 V / 250 watt Heater Harness | L9994304 | 5.4 |
| 115 V / 250 watt Heater Harness | L9994307 | 5.5 |
| 220 V / 250 watt Heater Harness | L9994308 | 5.6 |
| Normally Closed Thermal Switch (set to open at 365°) | L9964001 | 6 |
| Optional Normally Open Switch (set to close at 170°) | L9964002 | 7 |
| Fan | 661300138 | 8 |
| Foreline Baffle | L9676301 | 9 |
| Inlet Centering Ring Assembly, NW50 with Viton O-ring | L9680301 | 10 |
| Foreline Centering Ring Assembly, NW16 with Viton O-ring | KC16AV | 11 |
| Bottom Insulation | L9701002 | 12 |
| Santovac 5 diffusion pump fluid, 40 cc | 695405001 | 13 |
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