Home > Vacuum Pumps > Diffusion Vacuum Pumps > AX 65 Diffusion Pumps > Agilent Varian Foreline Exhaust Baffle for AX-65 Diffusion Pump, L9676301

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P107582

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Agilent Varian Foreline Exhaust Baffle for AX-65 Diffusion Pump, L9676301

Agilent Varian Foreline Exhuast Baffle for AX-65 Diffusion Pump
Agilent Varian Part Number L9676301

This is the foreline exhaust baffle for the AX-65 Diffusion Pump. For location of foreline exhaust baffle see item #9 on (diagram exploded view & parts illustration) below.

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Specifications
Specification	Units	AX-65 with cold cap	AX-65 with baffle
Operating Range	Torr mbar	3x10⁻³ to < 5x10⁻⁸ 3.9x10⁻³ to < 6.5x10⁻⁸	8.0x10⁻³ to < 5x10⁻⁸ 10.4x10⁻³ to < 6.5x10⁻³
Pumping Speed, Maximum	l/s, Air l/s, Helium	65 90	30 65
Throughput (Air), Max. Optimum Range Overload Range (@ 1x10⁻² Torr)	Torr-l/s mbar-l/s Torr-l/s mbar-l/s	0.19 0.25 0.30 0.40
Forepressure, Max. No Load Full Load	Torr mbar Torr mbar	0.75 1.00 0.60 0.78
Compression Ratio	Air He	4x10⁻⁷ 4x10⁻⁶
Backstreaming Rate at Pump Inlet	mg/cm²	< 2x10⁻⁴	< 2x10⁻⁵
Electrical Power VAC, 50/60 Hz 1 Phase	Watts	200/250
Warmup Time	minutes	7
Cooldown Time	minutes	10
Fluid Charge	cc	30
Recommended backing pump capacity	cfm (m³/hr)	≥ 1.5 (2.5)
Cooling Fan	cfm	30
Inlet Flange	N/A	NW50 or ISO-63-K
Body	N/A	Stainless steel
Jet Assembly	N/A	Three-stage, self-aligning, aluminum, w/ aluminum cold cap
Net Weight	lbs (kg)	8 (3.63)

AX-65 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Jet Assembly	L9674301	1
Cold Cap	L9675301	2
Inlet Baffle	L9706001	3
Inlet Baffle Retrofit Kit	R1160065	3
Jet Alignment Kit	L9995301	4
Heaters (one heater required per pump)		5
90 V / 250 watt Heater Harness	L9994301	5.1
115 V / 250 watt Heater Harness	L9994303	5.2
165 V / 250 watt Heater Harness	L9994302	5.3
220 V / 250 watt Heater Harness	L9994304	5.4
115 V / 250 watt Heater Harness	L9994307	5.5
220 V / 250 watt Heater Harness	L9994308	5.6
Normally Closed Thermal Switch (set to open at 365°)	L9964001	6
Optional Normally Open Switch (set to close at 170°)	L9964002	7
Fan	661300138	8
Foreline Baffle	L9676301	9
Inlet Centering Ring Assembly, NW50 with Viton O-ring	L9680301	10
Foreline Centering Ring Assembly, NW16 with Viton O-ring	KC16AV	11
Bottom Insulation	L9701002	12
Santovac 5 diffusion pump fluid, 40 cc	695405001	13

Agilent Varian AX-65 Diffusion Pump Manual.PDF

Agilent Diffusion Pumps Catalog.pdf

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