Ebara ESR20N-HT Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), With Heated Silincer, Water Cooled, 3-Phase, 200-220V, 60Hz. PN: 203537
Ebara ESR20N-HT Multistage Dry Vacuum Pump, Pumping Speed 45 to 70 CFM (1300 - 2000 l/m), With Heated Silincer, Clean to Medium Duty Processes, Water Cooled, 3-Phase, 200-220V, 60Hz. Ebara Part Number: 203537.
The Ebara ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The Ebara ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr. This listing is for the sale of the Ebara ESR20N-HT Multistage Dry Vacuum Pump, 120cfm 2000l/m, With Heated Silincer, Clean to Medium Duty Processes, Water Cooled, 200-220V / 3Ph, PN: 203537.
Applications
Sputtering
PVD
Load Lock and Transfer
Ashing
Ion Implanter
Etch
Clean Gases and Processes
Benefits and Features of the Ebara ESR series dry rotary lobe pumps.
Oil Free
Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
No Nitrogen purge required for ESR20N in clean applications
Variable pumping speed to match application requirements
High performance brushless DC motors
State-of-the-art control and monitoring devices
Idle mode can be employed for increased utility savings
