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Keyword       Ideal Spectroscopy Part Number       Manufacturer Part Number

× Molecular-Spectroscopy Optical-Table-Accessories Absorption-Spectroscopy-Gas-Cells Ultra-High Purity Gas Products Pulse-Valves-For-Jet-Cooling Vacuum-Pressure-Measurement Fittings-and-Flanges Vacuum-Valves Vacuum-Pumps Modular-Vacuum-Chambers

Condition:
  New
Part Number:
  P1011721
Warranty:
  Full Manufacturer's Warranty

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$2,708.91


Print Version

Edwards Semi E73 Micro TIM Control Module for Edwards EPX, iGX, GX, iXH, iXL, Dry Pumps, D37360340


Edwards Semi E73 Micro TIM Module
D37360340

Semi E73 Micro TIM module provides Semi E73 compliant tool interface for dry pumps with a MicroTIM slot. A Semi E73 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Semi E73 Micro TIM is compatible with the following Edwards pumps.

  • EPX Series
  • iGX Series
  • GX Series
  • iXH Series
  • iXL Series
  • Also for use on multi pump systems with a System Controller.
Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.


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Ideal Vacuum Parts list A
PDF Logo Edwards Micro Tool Interface TIM Instruction Manual.pdf

PDF Logo Edwards iTIM Instruction Manual.pdf



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CONTACT US
Ideal Spectroscopy
5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

Phone: (505) 872-0037
Fax: (505) 872-9001
info@idealspectroscopy.com



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