The MKS The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. The instrument sets new standards for vacuum gauge controllers and can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications. The PDR900 controller is the ideal solution for vacuum measurement, configuration of digital transducers and advanced system diagnostics. The controller features an easy to use menu-driven user interface, which guides the user through setup and configuration of remote transducer parameters. The readout unit communicates digitally with the transducer which eliminates analog measurement noise coupling via transducer cables. The unit automatically detects the 900 series transducer types, and can be used with both RS232 and RS485 transducers (Not compatible with 909/909A or 903 analog transducers). For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

The MKS HPS® Series 901P Plus Transducer has a combined sensor output that measures from 1x10 to 1,000 Torr for monitoring pump-down cycles. This unique patented transducer is designed specifically for the loadlock environment, the 901 Plus (901P) replaces up to three sensors in one compact package. The 901P provides both pressure measurement and atmospheric switching capabilities, by integrating the MicroPirani™ and piezo sensor technologies. The differential sensor ensures accurate atmospheric pressure sensing under varying barometric pressure conditions, for optimum loadlock performance. Customers requiring both a power supply and display can use the 901P with the PDR900 Series Controller sold on this website. For complete specs and operation information See AVAILABLE DOWNLOADS below.

The HPS® Series 902 absolute piezo transducer combines the pressure measurement technology of a MEMS-based piezo sensor with integrated electronics. The 902 provides an economical, absolute measurement that is independent of gas type. With a measurement range of 0.1 to 1,000 Torr full scale, the sensor is ideal for applications including semiconductor manufacturing, thin film coatings, freeze drying, lamps and light bulb production, medical devices, automotive and aerospace. Customers requiring both a power supply and display can use the 902 with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

The HPS® hot cathode sensor is Bayard-Alpert style, which utilizes a fine wire collector located at the center of a grid. Due to its small area, few x-rays hit the collector; therefore, the gauge can measure very low pressures. The 909AR transducer includes two yttria-coated iridium filaments for reduced downtime. Yttria-coated iridium is resistant to damage caused by high oxygen partial pressures and exposure to atmosphere. The tube sensor operates at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. The sensor includes a screen to shield it from large particles. The Series 909AR includes RS232 or RS485 digital communication as a standard feature.

The 910-12030 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW16 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy.

The HPS® Series 910 is a dual sensor transducer, combining the pressure measurement technology of Pirani and Piezo with an integrated electronic control circuit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr.

NEW MKS HPS® Series 910 DualTrans™ Micropirani Absolute Piezo Transducer, KF25, RS485, DISPLAY, No Relays, PN 910-21024 The MKS 910-21024 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW25 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy.

The MKS 925 features an increased pressure measurement range from 1x10 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF16 flange RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and 3 relays. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed reading can be seen from

The MKS 925 features an increased pressure measurement range from 1x10 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF25 flange RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and 3 relays. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed reading can be seen from

These Ideal Vacuum AC universal power supply wall transformers are for MKS Granville-Phillips® 275 Mini-Convectron® modular vacuum pressure transducers or for MKS Granville-Phillips 900 Series transducers with built in display. These cables convert 50-60 Hz, 120-240 VAC to 12 VDC and connect via a 15 pin connection. Cable length is 6 feet (1.8 m).

The MKS 925 features an increased pressure measurement range from 1x10 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF25 flange RS485/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and NO relays. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change; please call us at (505)872-0037 for updated pricing information. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments.

The MKS 925 features an increased pressure measurement range from 1x10 Torr to atmosphere, two decades below a standard Pirani sensor. The Series 925 MicroPirani™ transducer is a thermal conductivity gauge and incorporates a MEMS MicroPirani™ sensor technology in a compact package. The 925 has three optional set point relays. With its extended range, the 925 may replace multiple transducers, in certain applications. This has a KF25 flange RS232/Analog, 0-9VDC 1V/Decade, 15 pin sub-D male, and 3 relays. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® and MicroPirani™ are a registered Trademarks MKS Instruments.

The 971 UniMag transducer offers a measurement range from 1x10Torr to 5x10Torr and is based on cold cathode inverted magnetron sensor technology. The 971 is a cost effective solution for base pressure measurement and control. The Series 971 UniMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 971 UniMag transducers also has an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.The Series 971 UniMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 971 UniMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer electronics. Customers requiring both a power supply and display can use the 971 UniMag with the PDR900 Series Controller sold on this website. For complete specs and operation information See AVAILABLE DOWNLOADS below.

The 974 QuadMag offers a measurement range from 1x10 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani™ and Piezo differential sensor technologies. The 974 has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974 can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. The Series 974 QuadMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.

to 1500 Torr. RS232, Absolute Process Measurement. The MKS 974B QuadMag Cold Cathode Transducer belongs to the MKS 970 Series, a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPirani™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10- Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit. The transducer measurement range is 10- to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-

The MKS 974B QuadMag Cold Cathode Transducer belongs to the MKS 970 Series, a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPirani™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10- Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit. The transducer measurement range is 10- to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-

The MKS HPS® Series 979B Atmosphere to Vacuum (ATV) transducer is a general purpose vacuum transducer that provides a wide measurement range, from 10-10 torr (UHV) to atmospheric pressure. The 979B combines both the MEMS-based MicroPirani™ and a miniaturized hot cathode sensor in a single housing for simplified gauge integration. The 979B can be operated via digital communication (RS232 or RS485) or as an autonomous analog unit. Degas and filament select can be controlled via digital communication, push button control from the top panel or analog connections. Customers requiring both a power supply and display can use the 979B with the PDR900 Series Controller PN P102879 sold on this website.

The MKS HPS® Series 999 Quattro™ is the ultimate transducer solution, providing pressure measurement from 10 Torr to atmosphere, combined with atmospheric switching capabilities. The Quattro combines three of HPS' key technologies into an integrated gauge solution, and has the functionality of four sensors in one compact package. The Quattro includes the miniaturized hot cathode ionization sensor, the MEMS-based MicroPirani™ sensor and a unique piezo sensor, offering both differential and absolute sensor functions. Customers requiring both a power supply and display can use the 999 with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information see the DOWNLOADS section.

This Ideal Vacuum cable connects an MKS MGPD-E digital power supply and readout to a single 902 or 902B Absolute Piezo Vacuum Pressure Transducer. DB male to DB9 female connectors for RS232 or RS485 serial communication. 10 feet (3 meters) length.

This MKS Cable connects PDR900 to Series 902, 925, & 925C - 9 Pin, to 15 Pin Transducers, 10 ft. (3m) length, RS232. For selection guide of all MKS 900 Series Vacuum Transducers see AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® is a registered trademark of MKS Instruments, Inc.

This MKS vacuum gauge cable connects the PDR900 controller to most MKS 900 series vacuum pressure transducers. It is a 15-pin male to female cable, 10 ft (3 meters) in length, has MKS part number 100013620, and works with the following Transducer models: MKS 901PMKS 909ARMKS 910MKS 925MKS 979BMKS 971MKS 972MKS 973MKS 974MKS 999 For additional information and references on the MKS 900 series vacuum pressure transducers, please see the selection guide available in the downloads section below. HPS is a registered trademark of MKS Instruments, Inc. Specifications and prices are subject to change without notice. HPS® is a registered trademark of MKS Instruments, Inc.