MKS General Purpose Flow Control Valve, 500 sccm, 4 VCR® M Swagelok® tube fitting, Viton Seals
MKS Part Number: 148JA52CR1M
When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, 148J valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 148JA52CR1M valve features a 500 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, 4 VCR® M tube fittings, and Viton seals. Through closed valve leakage conductance is <1x10-5 scc/sec He.
Swagelok® and VCR® are registered trademarks of Swagelok Company. Vac Goop™ is a trademark of Swagelok Company. Ideal Vacuum Products is not an authorized distributor of Swagelok Company.
