Agilent Varian 563 Glass Ion Gauge Tube, Tungsten filament, 1 inch NONEX Port, Vacuum Pressure Gauge.
These Ion Gauge Tubes have a 1 inch port vacuum connection and an operating range from 1x10
-3 to 2x10
-10 Torr. These ion gauge tubes are compatible with most modern hot cathode ion gauge tubes. They have a sensitivity of Torr-1 and standard operating voltages (collector 0 VDC, Grid +180 VDC, filament +30 VDC with 4 VAC filament voltage).
In high and ultra-high vacuum ranges, a platinum shield prevents external electrical fields from affecting the low ion current. In higher pressure ranges where the number of ions
produced is much greater, the platinum conductive coating drains off the static charge which can build up on the inside of the glass tube. Thus, the 563 tube gives superior
performance throughout the entire range of the tube.
Our replacement ion gauge tubes work with most hot cathode ion gauge controllers made by Granville Phillips, MKS Instruments, Perkin Elmer, Varian, & Veeco.
For Instruction Manual on the Agilent Varian 563 Ion Gauge, download the .pdf below at AVAILABLE DOWNLOADS.
Typically Works With:
- Granville Phillips Models 260, 270, 280, 303, 306, 307 330, 340 ,350, and others.
- MKS Instruments 290, 919, 929
- Perkin Elmer DGC3
- Varian 831, 836, 842, 844, 845, 880, 971-0003, 971-0014, 971-1008, Multi-Gauge, Varian 572 Tube K7360301
- Veeco RG2, RG3, RG21, RG31, RG81, RG83, RG84, RG830, RG840, RG1000, RG1002
