HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN63 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-0253R. ISO-63 Bolt Down Flange with M8 x 1.25 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-0253R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 63 vacuum flange with M8 x 1.25 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-0253R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN100 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-0403R. ISO-100 Bolt Down Flange with M8 x 1.25 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-0403R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 100 vacuum flange with M8 x 1.25 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-0403R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -80, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

MKS R-Series Gate Valve ISO-F 100, DN100, Pneumatic, 24 VDC Solenoid, Dual Position Indicator Switches (N/O), 4 inch ID, Viton Seals,Bolted Down Flange (M8 x 1.25), Stainless Steel Body. These MKS R-Series gate valves are optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. These R-Series gate valves are well suited for high vacuum (HV) applications down to 1x10-7 Torr and have options, including pneumatic and position indicators. The R-Series employs an elastomer shaft seal for the actuator seal, which enables high performance in a cost effective, high value package for roughing vacuum applications. This listing is for the ISO-100 bolt down vacuum flange version with pneumatic air actuator including a 24 VDC solenoid valve and dual position indicator switches (normally open). Product Features:Excellent temperature uniformity ensures no cold spots on internal surfaces DN80 and DN100 > 200,000 cycles DN160 > 100,000 cycles DN80, DN100 and DN160mm sizes available Product Configuration:Valve Bore/Flange Size: DN100 Materials: Stainless Steel Acutation: Pneumatic Seal Materials: Viton/FKM Limit Switches: Both Switches Normally Open (N/O) Magnetic Reed Switch: Current rating < 80mA Solenoids: 24 VDC Heating Options: Heatable to 105°C Pressure Range (High Vacuum HV): 1x10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar) Pneumatic Pressure: 5.4 ±1.3 atm (80 ±20 psig) Actuator Seal: Elastomer shaft seal - Viton Side to Side Leak Rate: 1x10-9 atm*cc/sec External Leak Rate: 1x10-9 atm*cc/sec Max Delta Pressure - Operating: 22.5 Torr (30 mbar) chamber side high Max Delta Pressure - Closed: 1.6 atm, either direction

MKS T2BA Butterfly Exhaust Throttle Valve, KF40, "F-Seal" (Viton O-ring on flapper), Low Power Motor (8 in-lbs), 105°C, RS232, with +/-15VDC Sensor Power Supply (for Baratron). MKS Part Number: T2BA01K320003V210025. The MKS T2BA Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement. Product Features:Compact pressure control system - valve with integrated on-board controller electronics - Easy integration, no need for additional cables or rack space High-speed configurations available (<250 msec. open to close) - Faster set point and recovery from flow and pressure perturbations - Enables high tool throughput Selectable high torque drives - Extends uptime in harsh process conditions Dual channel Baratron® sensor input with range auto switching - Supports wide dynamic pressure control range - Allows for high pressure control accuracy Advanced model-based pressure control algorithm - Minimizes time to set point - Ensures repeatable process recipes without operator involvement Available in low conductance soft-sealing versions - Supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) - Suitable for "house exhaust" or atmospheric applications Provides power for connected Baratron capacitance manometers (optional, some models) The T2BA Exhaust Throttle Valve can operate in two primary modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is fully compatible with EtherCAT manometers. Analog manometers require a gateway. The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and extends preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.The T2BA valves are optionally heatable up to 200°C with available MKS external heaters (proper selection of seal materials is required). The T2BA is available in unique MKS low-conductance versions, enabling high-speed pressure control in atmospheric applications, including exhaust pressure control, CVD and RTP without a need for relying on O-Ring-based designs to minimize valve conductance. An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosion-resistant 316 stainless steel compatible with most process gases and is available in standard ISO flange styles with bore sizes from 1" to 4" (alternate sizes available on a custom basis). Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries and/or heated applications.

MKS T2BA Butterfly Exhaust Throttle Valve, ISO100, Non-Sealing (No O-ring; 0.003" Radial Gap), Low Power Motor (8 in-lbs), 105°C,Viton (body seal), RS232, with +/-15VDC Sensor Power Supply (for Baratron). MKS Part Number: T2BA04N220303V210025. The MKS T2BA Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement. Product Features:Compact pressure control system - valve with integrated on-board controller electronics - Easy integration, no need for additional cables or rack space High-speed configurations available (<250 msec. open to close) - Faster set point and recovery from flow and pressure perturbations - Enables high tool throughput Selectable high torque drives - Extends uptime in harsh process conditions Dual channel Baratron® sensor input with range auto switching - Supports wide dynamic pressure control range - Allows for high pressure control accuracy Advanced model-based pressure control algorithm - Minimizes time to set point - Ensures repeatable process recipes without operator involvement Available in low conductance soft-sealing versions - Supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) - Suitable for "house exhaust" or atmospheric applications Provides power for connected Baratron capacitance manometers (optional, some models) The T2BA Exhaust Throttle Valve can operate in two primary modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is fully compatible with EtherCAT manometers. Analog manometers require a gateway. The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and extends preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.The T2BA valves are optionally heatable up to 200°C with available MKS external heaters (proper selection of seal materials is required). The T2BA is available in unique MKS low-conductance versions, enabling high-speed pressure control in atmospheric applications, including exhaust pressure control, CVD and RTP without a need for relying on O-Ring-based designs to minimize valve conductance. An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosion-resistant 316 stainless steel compatible with most process gases and is available in standard ISO flange styles with bore sizes from 1" to 4" (alternate sizes available on a custom basis). Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries and/or heated applications.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN80 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-0303R. ISO-80 Bolt Down Flange with M8 x 1.25 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-0303R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 80 vacuum flange with M8 x 1.25 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-0303R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -80, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN160 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-0603R. ISO-160 Bolt Down Flange with M10 x 1.50 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-0603R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 160 vacuum flange with M10 x 1.50 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-0603R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN200 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-0603R. ISO-200 Bolt Down Flange with M10 x 1.50 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-0803R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 200 vacuum flange with M10 x 1.50 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-0803R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN250 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-1003R. ISO-250 Bolt Down Flange with M10 x 1.50 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-1003R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 250 vacuum flange with M10 x 1.50 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-1003R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN320 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11210-1203R. ISO-320 Bolt Down Flange with M12 x 1.75 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11210-1203R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 320 vacuum flange with M12 x 1.75 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11210-1203R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN400 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11212-1603R. ISO-400 Bolt Down Flange with M12 x 1.75 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11212-1603R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 400 vacuum flange with M12 x 1.75 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11212-1603R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.

HVA High Vacuum HV Pneumatic Gate Valve ISO-F DN500 Flange, Viton Gate and Bonnet Seals, 304 Stainless Steel, PN: 11212-2003R. ISO-500 Bolt Down Flange with M12 x 1.75 Threads. Includes Built-In Reed Switch Position Indicators. HVA Part Number: 11212-2003R. These HVA brand pneumatically operated series 11000 gate valves are made in the U.S.A and have an ISO-F DN 500 vacuum flange with M12 x 1.75 blind-tapped holes. They are rated for high vacuum (HV) and follow vacuum technology standards as described in DIN 28404 and ISO 1609. HVA Part Number: 11212-2003R. HVA pneumatically operated vacuum gate valves feature a positive lock-over center mechanism which keeps the valve locked closed during loss of power or air pressure. Gate, bonnet, and bellows seals are made of Viton fluoroelastomer (FKM) material. They are made with corrosion resistant 304 stainless-steel gates and valve bodies and have a typical life of 100,000 cycles (depending on the process) before needing service. HVA valve bodies have one of the smallest interior surface areas in the vacuum valve industry. The body and all major internal components are vacuum furnace brazed at 1100°C at 1x10-6 Torr using a proprietary process which ensures maximum joint integrity, minimizes outgassing during operation, eliminates the possibility of virtual leaks or entrapment areas, and minimizes body distortion found in conventionally welded valves. HVA gate valves with ASA, ISO, or KF flanges are rated for high vacuum applications and are limited to ultimate pressures in the 10-8 Torr range due to O-ring gas permeability. HVA gate valves have a helium leak rate of 1.5 x 10-10 Torr l/sec and are bakeable to 150 °C (with the valve open or closed). These pneumatically operated valves include 1/4" OD tubing push-to-connect fittings. Open and closed position sensors are built into the pneumatic actuator and are standard on all HVA pneumatic gate valves. These on/off switches can be used to activate indicator lights or used to control a more complex or automated vacuum protection system. Solenoids for pneumatic valves are available in 24 VDC and 120 VAC varieties and are sold separately. Repair kits are available for all HVA gate valves we carry. HVA gate valves are often used in combination with cryo, turbo, diffusion, and ion high vacuum pumps. They are available in high vacuum and ultra-high vacuum varieties in the following sizes: Quick flanged sizes KF-16, KF-25, KF-40, and KF-50 ISO LF flanged ISO-63, -100, -160, -200, -250, -320, -400, and -500 sizes ASA ANSI sizes 2, 4, and 6 inch sizes Conflat (CF) 1.33 , 2.75, 3.375, 4.5, 6, 8, 10, 12, 13.25, and 14 inch sizes The installation manual and operating instructions are available in the downloads.